Evaporator

Beskrivning

The procurement concerns the complete delivery of an Evaporator including a process chamber, vacuum pumps, a control system and software, documentation and training on-site. Linköping University (LiU) is procuring a vacuum deposition system (Evaporator) for coating of thin films for the clean room facility of Täppan at the Department of Science and Technology (ITN). In this system, a solid material will be heated to such a high temperature that the particles can travel to the target surface under high vacuum and form a homogenous thin coating.LiU requires an Evaporator with physical vapor deposition (PVD) via thermal and e-beam methods with precise control over the deposition (i.e. thickness and rate). This will allow the deposition of a wide range of materials (metals and non-metals) and ensuring reproducible results